TY  - RPRT
TI  - Building reliable 3D photonic integrated circuits and cavities at the wafer scale
AU  - Yuhao Huang
AU  - Yunqi Fu
AU  - Yu Xia
AU  - Yuemin Li
AU  - Zheng Li
AU  - Yaoran Huang
AU  - Zhaoting Geng
AU  - Mingfei Liu
AU  - Chao Xiang
PY  - 2026
UR  - https://arxiv.org/abs/2604.12889
ID  - 2604.12889
ER  -