TY - RPRT TI - Thermal conductivity tuning of scalable nanopatterned silicon membranes measured with a three-probe method AU - Jose M. Sojo-Gordillo AU - Alex Rodriguez-Iglesias AU - Dominik M. Koch AU - Arianna Nigro AU - IƱigo Martin-Fernandez AU - Marta Fernandez-Regulez AU - Marc Salleras AU - Ilaria Zardo PY - 2026 UR - https://arxiv.org/abs/2604.14770 ID - 2604.14770 ER -