TY  - RPRT
TI  - High-yield fabrication of micromirror templates via feedback-controlled laser ablation
AU  - Daniel Allepuz-Requena
AU  - Jonas Schou Neergard-Nielsen
AU  - Alexander Huck
AU  - Ulrik Lund Andersen
PY  - 2026
DO  - 10.1063/5.0339359
UR  - https://arxiv.org/abs/2604.16150
ID  - 2604.16150
ER  -