@misc{indiciae0966c36c1147, title = {Gradient Residual Stress in Transferred Thin-Film Lithium Niobate and Its Compensation Using Periodically Poled Piezoelectric Bilayers}, author = {Byeongjin Kim and Ian Anderson and Tzu-Hsuan Hsu and Ruochen Lu}, year = {2026}, doi = {10.1109/jmems.2026.3720480}, url = {https://arxiv.org/abs/2604.20694}, note = {Source identifier: 2604.20694} }