TY  - RPRT
TI  - Gradient Residual Stress in Transferred Thin-Film Lithium Niobate and Its Compensation Using Periodically Poled Piezoelectric Bilayers
AU  - Byeongjin Kim
AU  - Ian Anderson
AU  - Tzu-Hsuan Hsu
AU  - Ruochen Lu
PY  - 2026
DO  - 10.1109/jmems.2026.3720480
UR  - https://arxiv.org/abs/2604.20694
ID  - 2604.20694
ER  -