@misc{indiciae74679876dc8e,
  title = {Tantalum Damascene Coplanar Waveguide Resonators Fabricated Using 300 mm Scale Processes},
  author = {Ekta Bhatia and Yingge Du and Krishna P Koirala and Chung Kow and Mingzhao Liu and Juan Macy and Tharanga R. Nanayakkara and Francisco Ponce and Satyavolu S. Papa Rao and Drew J. Rebar and Peter V. Sushko and Brent A VanDevender and Chongmin Wang and Marvin G. Warner and Zhihao Xiao},
  year = {2026},
  url = {https://arxiv.org/abs/2604.22086},
  note = {Source identifier: 2604.22086}
}