@misc{indiciae041d3dba45ec,
  title = {The influence of implantation conditions on dopant activation in Al-implanted 4H-SiC: A MD study applying an Al potential fitted to DFT barriers},
  author = {Sabine Leroch and Robert Stella and Andreas Hössinger and Lado Filipovic},
  year = {2026},
  doi = {10.1039/d6tc01299j},
  url = {https://arxiv.org/abs/2604.22434},
  note = {Source identifier: 2604.22434}
}