@misc{indiciaefcb619ff1ae5,
  title = {Evidence of Micron-Scale Ion Damage in (010), (110), and (011) \$β-Ga\_2O\_3\$ Epitaxial Layers},
  author = {Carl Peterson and Chinmoy Nath Saha and Yizheng Liu and James S. Speck and Sriram Krishnamoorthy},
  year = {2026},
  url = {https://arxiv.org/abs/2604.24190},
  note = {Source identifier: 2604.24190}
}