TY  - RPRT
TI  - Evidence of Micron-Scale Ion Damage in (010), (110), and (011) $β-Ga_2O_3$ Epitaxial Layers
AU  - Carl Peterson
AU  - Chinmoy Nath Saha
AU  - Yizheng Liu
AU  - James S. Speck
AU  - Sriram Krishnamoorthy
PY  - 2026
UR  - https://arxiv.org/abs/2604.24190
ID  - 2604.24190
ER  -