TY  - RPRT
TI  - SPARSE -- Efficient High-Resolution SEM Imaging of Rare Microstructural Features Across Large Areas by Selective Rescanning
AU  - Tom Reclik
AU  - Jan Gerlach
AU  - Maximilian A. Wollenweber
AU  - Yannis P. Korkolis
AU  - Sandra Korte-Kerzel
AU  - Ulrich Kerzel
PY  - 2026
DO  - 10.1016/j.matchar.2026.116767
UR  - https://arxiv.org/abs/2604.24769
ID  - 2604.24769
ER  -