@misc{indiciae3219e89958e0,
  title = {WaferSAGE: Large Language Model-Powered Wafer Defect Analysis via Synthetic Data Generation and Rubric-Guided Reinforcement Learning},
  author = {Ke Xu and Zhongyuan Lian},
  year = {2026},
  url = {https://arxiv.org/abs/2604.27629},
  note = {Source identifier: 2604.27629}
}