TY  - RPRT
TI  - WaferSAGE: Large Language Model-Powered Wafer Defect Analysis via Synthetic Data Generation and Rubric-Guided Reinforcement Learning
AU  - Ke Xu
AU  - Zhongyuan Lian
PY  - 2026
UR  - https://arxiv.org/abs/2604.27629
ID  - 2604.27629
ER  -