@misc{indiciaea948b23ce038,
  title = {An Unsupervised Machine Learning-based Framework for Wafer Scale Variability Analysis and Performance Prediction of Ferroelectric Hf0.5Zr0.5O2 Thin Film Capacitors},
  author = {Anika Anu and Sayani Majumdar},
  year = {2026},
  url = {https://arxiv.org/abs/2605.00544},
  note = {Source identifier: 2605.00544}
}