TY  - RPRT
TI  - An Unsupervised Machine Learning-based Framework for Wafer Scale Variability Analysis and Performance Prediction of Ferroelectric Hf0.5Zr0.5O2 Thin Film Capacitors
AU  - Anika Anu
AU  - Sayani Majumdar
PY  - 2026
UR  - https://arxiv.org/abs/2605.00544
ID  - 2605.00544
ER  -