@misc{indiciae4b93ebdb8528,
  title = {Full-chip CMP modelling based on Fully Convolutional Network leveraging White Light Interferometry},
  author = {Jules Exbrayat and Renan Bouis and Elie Sezestre and Viorel Balan and Arnaud Cornelis and Damien Hebras and Catherine Euvrard},
  year = {2026},
  url = {https://arxiv.org/abs/2605.05062},
  note = {Source identifier: 2605.05062}
}