@misc{indiciaee3db1551cd4d,
  title = {Active Edge Silicon Sensors Fabricated With Edge Ion Implantation and Microwave Annealing for Dopant Activation},
  author = {Andrew Gentry and Julie Segal and Angela Kok and Christopher Kenney and Sally Seidel},
  year = {2026},
  url = {https://arxiv.org/abs/2605.05453},
  note = {Source identifier: 2605.05453}
}