TY  - RPRT
TI  - Active Edge Silicon Sensors Fabricated With Edge Ion Implantation and Microwave Annealing for Dopant Activation
AU  - Andrew Gentry
AU  - Julie Segal
AU  - Angela Kok
AU  - Christopher Kenney
AU  - Sally Seidel
PY  - 2026
UR  - https://arxiv.org/abs/2605.05453
ID  - 2605.05453
ER  -