@misc{indiciae5b9ed955108f,
  title = {Si/SiGe multi-channel superlattice structure epitaxial growth with segmented temperature control for Next-Generation Logic Devices},
  author = {Wenlong Yao and Zhigang Li and Guobin Bai and Jianfeng Gao and Jiahan Yu and Junfeng Li and Xiaolei Wang and Jun Luo},
  year = {2026},
  url = {https://arxiv.org/abs/2605.05667},
  note = {Source identifier: 2605.05667}
}