TY  - RPRT
TI  - Si/SiGe multi-channel superlattice structure epitaxial growth with segmented temperature control for Next-Generation Logic Devices
AU  - Wenlong Yao
AU  - Zhigang Li
AU  - Guobin Bai
AU  - Jianfeng Gao
AU  - Jiahan Yu
AU  - Junfeng Li
AU  - Xiaolei Wang
AU  - Jun Luo
PY  - 2026
UR  - https://arxiv.org/abs/2605.05667
ID  - 2605.05667
ER  -