@misc{indiciae885459920bf6,
  title = {Robust and Reliable AI for Predictive Quality in Semiconductor Materials Manufacturing with MLOps and Uncertainty Quantification},
  author = {Min Gao and Julia Maria Perathoner and Anton Ludwig Bonin and Steven Eulig and Gianni Klesse},
  year = {2026},
  url = {https://arxiv.org/abs/2605.07752},
  note = {Source identifier: 2605.07752}
}