TY  - RPRT
TI  - Robust and Reliable AI for Predictive Quality in Semiconductor Materials Manufacturing with MLOps and Uncertainty Quantification
AU  - Min Gao
AU  - Julia Maria Perathoner
AU  - Anton Ludwig Bonin
AU  - Steven Eulig
AU  - Gianni Klesse
PY  - 2026
UR  - https://arxiv.org/abs/2605.07752
ID  - 2605.07752
ER  -