@misc{indiciaebe4b7b32d3bd,
  title = {Nullspace-based Fault Diagnosis for Closed-Loop Mechatronic Systems with Application to Semiconductor Equipment},
  author = {Koen Classens and Jeroen van de Wijdeven and Maurice Heemels and Tom Oomen},
  year = {2026},
  url = {https://arxiv.org/abs/2605.09689},
  note = {Source identifier: 2605.09689}
}