TY  - RPRT
TI  - Nullspace-based Fault Diagnosis for Closed-Loop Mechatronic Systems with Application to Semiconductor Equipment
AU  - Koen Classens
AU  - Jeroen van de Wijdeven
AU  - Maurice Heemels
AU  - Tom Oomen
PY  - 2026
UR  - https://arxiv.org/abs/2605.09689
ID  - 2605.09689
ER  -