@misc{indiciaec9574cefa212,
  title = {Development of Small-pitch, Ultra-thin 3D Silicon Sensors at USTC},
  author = {Kuo Ma and De Zhang and Shengjia He and Tian-ao Wang and Han Li and Yu Nie and Xiuxia Wang and Jinlan Peng and Zheng Liang and Xiang Li and Wenhua Shi and Manwen Liu and Chuan Liao and Zheng Li and Zebo Tang and Yanwen Liu},
  year = {2026},
  url = {https://arxiv.org/abs/2605.13281},
  note = {Source identifier: 2605.13281}
}