@misc{indiciaee22ccc5b7d91,
  title = {Holographic EUV Lithography at 40 nm Resolution},
  author = {Ziqi Li and Iason Giannopoulos and Lisong Dong and Dimitrios Kazazis and Xu Ma and Zongqiang Yu and Zhiyuan Niu and Yasin Ekinci and Yayi Wei and Iacopo Mochi},
  year = {2026},
  url = {https://arxiv.org/abs/2605.21430},
  note = {Source identifier: 2605.21430}
}