@misc{indiciaee8fd089444fe,
  title = {SC-1 Etching of Niobium and Titanium Nitride Thin Films},
  author = {Adrián Gutiérrez-Cruz and K. A. C. Rathnathilaka and Jani M. Taskinen and Tuomas Vaimala and Kestutis Grigoras and Harshad Mishra and Rishabh Upadhyay and Jorden Senior and Alberto Ronzani},
  year = {2026},
  url = {https://arxiv.org/abs/2605.28343},
  note = {Source identifier: 2605.28343}
}