@misc{indiciae0a3514881968,
  title = {LithoGRPO: Fast Inverse Lithography via GRPO Reinforced Flow Matching},
  author = {Yao Lai and Xuyuan Xiong and Zeyue Xue and Guojin Chen and Jing Wang and Xihui Liu and Rui Zhang and Robert Mullins and Bei Yu and Ping Luo},
  year = {2026},
  url = {https://arxiv.org/abs/2606.00228},
  note = {Source identifier: 2606.00228}
}