@misc{indiciaedf6583c49de3, title = {Catalytic precursor dissociation in Hot-Wire CVD and comparing a-Si:H growth under continuous and pulsed silane flow conditions}, author = {Swati Goyal and Karam Veer Singh and Rajiv O. Dusane and Triratna P. Muneshwar}, year = {2026}, url = {https://arxiv.org/abs/2606.00788}, note = {Source identifier: 2606.00788} }