@misc{indiciae1529d0887e36,
  title = {Graph Attention-Based Virtual Metrology for Film Deposition Processes in Semiconductor Manufacturing},
  author = {Tao Han and Suk Ki Lee and Hyunwoong Ko},
  year = {2026},
  url = {https://arxiv.org/abs/2606.00923},
  note = {Source identifier: 2606.00923}
}