TY  - RPRT
TI  - Graph Attention-Based Virtual Metrology for Film Deposition Processes in Semiconductor Manufacturing
AU  - Tao Han
AU  - Suk Ki Lee
AU  - Hyunwoong Ko
PY  - 2026
UR  - https://arxiv.org/abs/2606.00923
ID  - 2606.00923
ER  -