TY - RPRT TI - PALTO: Physics-Informed Active Learning for Tri-Gate FinFET Design Optimization for Vertical Power Delivery AU - Ayoub Sadeghi AU - Leonid Popryho AU - Inna Partin-Vaisband PY - 2026 UR - https://arxiv.org/abs/2606.01265 ID - 2606.01265 ER -