@misc{indiciaee58a12578735,
  title = {Surface Modification for III-V Selective Area Molecular Beam Epitaxy of Non-Selective Mask Materials},
  author = {Ashlee M. García and Byron D. Aguilar and William J. Doyle and Pernille Undrum Fathi and Federico Capasso and Daniel Wasserman and Seth R. Bank},
  year = {2026},
  url = {https://arxiv.org/abs/2606.02317},
  note = {Source identifier: 2606.02317}
}