@misc{indiciae93e5bd3c068d,
  title = {Inductively Coupled Plasma Driven by Asymmetric Triangular Current Waveform},
  author = {Shahid Rauf and Tianhong Wang and Jason Kenney and Dmytro Sydorenko and Igor D. Kaganovich},
  year = {2026},
  url = {https://arxiv.org/abs/2606.02736},
  note = {Source identifier: 2606.02736}
}