TY  - RPRT
TI  - Inductively Coupled Plasma Driven by Asymmetric Triangular Current Waveform
AU  - Shahid Rauf
AU  - Tianhong Wang
AU  - Jason Kenney
AU  - Dmytro Sydorenko
AU  - Igor D. Kaganovich
PY  - 2026
UR  - https://arxiv.org/abs/2606.02736
ID  - 2606.02736
ER  -