@misc{indiciae63d347a2274d,
  title = {Confocal Subsurface Backscattering Microscopy for Optical Identification of Nanoscale Threading Dislocations in SiC Substrates},
  author = {Russel Cruz Sevilla and Hsiu-Ming Hsu and Irwan Saleh Kurniawan and Ruth Jeane Soebroto and Hsiu-Ying Huang and Jia-Ren Wu and Chia-Shain Chuang and Chao-Ming Fu and Sheng-Hsiung Chang and Wen-Chung Li and Chi-Tsu Yuan},
  year = {2026},
  url = {https://arxiv.org/abs/2606.04607},
  note = {Source identifier: 2606.04607}
}