TY  - RPRT
TI  - Confocal Subsurface Backscattering Microscopy for Optical Identification of Nanoscale Threading Dislocations in SiC Substrates
AU  - Russel Cruz Sevilla
AU  - Hsiu-Ming Hsu
AU  - Irwan Saleh Kurniawan
AU  - Ruth Jeane Soebroto
AU  - Hsiu-Ying Huang
AU  - Jia-Ren Wu
AU  - Chia-Shain Chuang
AU  - Chao-Ming Fu
AU  - Sheng-Hsiung Chang
AU  - Wen-Chung Li
AU  - Chi-Tsu Yuan
PY  - 2026
UR  - https://arxiv.org/abs/2606.04607
ID  - 2606.04607
ER  -