@misc{indiciaeb34b6b9d85f6,
  title = {Low Distortion Fusion Bonding using Pneumatically Warped Wafers},
  author = {Utkarsh Jain and Koen D'have and Philipp Schmidt and Damien Leech and Serena Iacovo and Philippe Muller and Dennis Bumuller and Thomas Schmidt and Koen Kennes and Steven Brems and Eric Beyne},
  year = {2026},
  doi = {10.1109/ectc51846.2026.00222},
  url = {https://arxiv.org/abs/2606.04625},
  note = {Source identifier: 2606.04625}
}