@misc{indiciaed9c83a458160,
  title = {Dynamics and structure of pull-in and touchdown behavior in parallel-plate electrostatic MEMS actuators via geometric approaches},
  author = {Yu Ichida and Kyoichi Kakuno and Daisuke Yamane},
  year = {2026},
  url = {https://arxiv.org/abs/2606.06796},
  note = {Source identifier: 2606.06796}
}