TY  - RPRT
TI  - Dynamics and structure of pull-in and touchdown behavior in parallel-plate electrostatic MEMS actuators via geometric approaches
AU  - Yu Ichida
AU  - Kyoichi Kakuno
AU  - Daisuke Yamane
PY  - 2026
UR  - https://arxiv.org/abs/2606.06796
ID  - 2606.06796
ER  -