@misc{indiciaefb4038a904a3,
  title = {Optimized Sampling of Angle-Resolved Scatterometry Data Using End-to-End Compressed Learning Model for Nanograss Deficiency Detection},
  author = {Mehdi Abdollahpour and Carsten Bockelmann and Armin Dekorsy},
  year = {2026},
  url = {https://arxiv.org/abs/2606.07050},
  note = {Source identifier: 2606.07050}
}