TY  - RPRT
TI  - Optimized Sampling of Angle-Resolved Scatterometry Data Using End-to-End Compressed Learning Model for Nanograss Deficiency Detection
AU  - Mehdi Abdollahpour
AU  - Carsten Bockelmann
AU  - Armin Dekorsy
PY  - 2026
UR  - https://arxiv.org/abs/2606.07050
ID  - 2606.07050
ER  -