@misc{indiciaeaa20c439b579,
  title = {Failure-Aware Refinement of Vision-Language Model for Lithography Defect Detection},
  author = {Pangyun Jeong and Jiyeong Kong and Yuehua Hu and Dohee Jeong and Kyung-Tae Kang},
  year = {2026},
  url = {https://arxiv.org/abs/2606.08908},
  note = {Source identifier: 2606.08908}
}