TY  - RPRT
TI  - Failure-Aware Refinement of Vision-Language Model for Lithography Defect Detection
AU  - Pangyun Jeong
AU  - Jiyeong Kong
AU  - Yuehua Hu
AU  - Dohee Jeong
AU  - Kyung-Tae Kang
PY  - 2026
UR  - https://arxiv.org/abs/2606.08908
ID  - 2606.08908
ER  -