@misc{indiciae5a6f7644a7d1, title = {Unsupervised Deep Learning for Limited-Angle STEM-EDX Tomography -- Application to 3D Chemical Analysis of Phase-Change Memory Devices}, author = {Daniel del Pozo Bueno and Serge Brosset and Theo Monniez and Gabriele Navarro and Philippe Ciuciu and Zineb Saghi}, year = {2026}, url = {https://arxiv.org/abs/2606.10547}, note = {Source identifier: 2606.10547} }