@misc{indiciaeef9e2a5e4ac3, title = {Event-Driven Reinforcement Learning Enables Long-Horizon Control in Semiconductor Fabrication}, author = {Yavar Yeganeh and Mahsa Shekari and Nicla Frigerio and Daniele Pagano and Andrea Matta}, year = {2026}, url = {https://arxiv.org/abs/2606.10705}, note = {Source identifier: 2606.10705} }