TY - RPRT TI - Event-Driven Reinforcement Learning Enables Long-Horizon Control in Semiconductor Fabrication AU - Yavar Yeganeh AU - Mahsa Shekari AU - Nicla Frigerio AU - Daniele Pagano AU - Andrea Matta PY - 2026 UR - https://arxiv.org/abs/2606.10705 ID - 2606.10705 ER -