@misc{indiciae13adb44d98d8,
  title = {Ultra-high Q-factor superconducting tantalum resonators on 300 mm Si wafers},
  author = {R. Acharya and D. Perez Lozano and Ts. Ivanov and S. Massar and C. Vrancken and Y. Canvel and Y. Li and A. M. Vadiraj and J. Van Damme and S. Aghaeimeibodi and A. Khalajhedayati and M. Mongillo and O. Painter and D. Wan and A. Potočnik and K. De Greve},
  year = {2026},
  url = {https://arxiv.org/abs/2606.10719},
  note = {Source identifier: 2606.10719}
}