@misc{indiciae24bfe5388ab9,
  title = {A single-step lithography process for reconfigurable SiN photonics with TiN heaters and Al interconnects},
  author = {Leonardo Limongi and Rachele Favaretto and Lorenzo Baldessarini and Martino Bernard and Yong Kwon and Gioele Piccoli and Alina Samusenko and Georg Pucker and Mher Ghulinyan},
  year = {2026},
  doi = {10.1088/1361-6439/ae8c47},
  url = {https://arxiv.org/abs/2606.10898},
  note = {Source identifier: 2606.10898}
}