TY  - RPRT
TI  - A single-step lithography process for reconfigurable SiN photonics with TiN heaters and Al interconnects
AU  - Leonardo Limongi
AU  - Rachele Favaretto
AU  - Lorenzo Baldessarini
AU  - Martino Bernard
AU  - Yong Kwon
AU  - Gioele Piccoli
AU  - Alina Samusenko
AU  - Georg Pucker
AU  - Mher Ghulinyan
PY  - 2026
DO  - 10.1088/1361-6439/ae8c47
UR  - https://arxiv.org/abs/2606.10898
ID  - 2606.10898
ER  -