@misc{indiciaea86e593d7ca7,
  title = {Physics-informed generative AI for semiconductor manufacturing: Enforcing hard physical constraints in generative models by construction},
  author = {Yaser Mike Banad and Sarah Sharif},
  year = {2026},
  url = {https://arxiv.org/abs/2606.11247},
  note = {Source identifier: 2606.11247}
}